Vacuum Technology and Gas Delivery Systems
Students will explore the fundamental principles of vacuum physics, various vacuum pump technologies, and advanced metrology techniques for measuring ultra-high vacuum conditions. The course also covers the design, operation, and safety protocols associated with gas delivery systems, including inert, toxic, and corrosive gases. Graduates will be equipped to troubleshoot vacuum system failures, perform routine maintenance on pumps and gauges, and manage gas handling equipment in a semiconductor fabrication environment, ensuring process integrity and operational safety. This knowledge is essential for maintaining critical process parameters and preventing contamination.
Prerequisites
Course outline
Lectures, virtual labs, and graded assignments — completed in your browser.
Syllabus
Week 1: Introduction to Vacuum Science and Semiconductor Processes Week 2: Gas Laws and Kinetic Theory of Gases Week 3: Vacuum Regimes and Pressure Measurement Units Week 4: Rough Vacuum Pumps: Mechanical and Dry Pumps Week 5: High Vacuum Pumps: Turbomolecular and Diffusion Pumps Week 6: Ultra-High Vacuum Pumps: Cryogenic and Ion Pumps Week 7: Vacuum Gauges: Principles and Applications Week 8: Leak Detection Techniques and System Troubleshooting Week 9: Vacuum System Materials and Components Week 10: Introduction to Gas Delivery Systems Week 11: Gas Sources, Storage, and Purity Requirements Week 12: Gas Flow Control and Distribution Components Week 13: Safety Considerations for Hazardous Gases Week 14: Gas System Monitoring, Maintenance, and Emergency Procedures